2:30 PM - 2:45 PM
[18p-431B-3] Development of a State-selected O2 Beam-XPS Combined Apparatus
Keywords:oxygen, surface reaction, XPS
Since O2 is a linear diatomic molecule, alignment of incident O2 relative to the surface is expected to affect the chemical state of oxide formed during the surface oxidation reaction. In this study, a laboratory XPS machine was combined with a state-selected O2 beam. It has been found that the control of local magnetic field at around the sample allows us to conduct an XPS analysis of surfaces irradiated with an aligned O2 beam.