[18p-PA2-1~20] 6.4 Thin films and New materials

[18p-PA2-4] Nitrogen doping to ZnO films in a catalytic reaction assisted chemical vapor deposition

〇Kanji Yasui¹, Yuki Adachi¹, Ryuta Iba¹, Shotaro Ono¹, Abdul Manaf² (1.Nagaoka Univ. Technol., 2.MJIIT)

Keywords:zinc oxide thin film, catalytic reaction

Attempting to the nitrogen doping to ZnO films grown by a catalytic reaction assisted CVD, nitrogen radicals generated on heated Ir wire surface from NO molecules were supplied during the film growth. From X-ray photoelectron spectroscopy, the proportion of Zn-N component in N-1s peak for the ZnO film grown with N-radicals was greater than that for the ZnO film without N-radicals. It was also found that the lower NO gas pressure lower than 0.01 Pa was effective on the formation of the Zn-N component.