The 79th JSAP Autumn Meeting, 2018

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Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[18p-PA2-1~20] 6.4 Thin films and New materials

Tue. Sep 18, 2018 1:30 PM - 3:30 PM PA (Event Hall)

1:30 PM - 3:30 PM

△ [18p-PA2-8] Investigation of room temperature solid-phase crystallization process of β-Ga2O3 thin film by ultraviolet excimer lamp / laser irradiation

〇Tomoaki Oga1, Hiroyuki Morita1, Yuki Ikeya1, Nobuo Tsuchimine2, Satoru Kaneko3,1, Akifumi Matsuda1, Mamoru Yoshimoto1 (1.Tokyo Tech, 2.TOSHIMA Manu., 3.KISTEC)

Keywords:Ga2O3, UV excimer light, Laser annealing