[18p-PB2-1~7] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

△ [18p-PB2-5] A Study on High-Resolution 3-Axis Parallel-Plate MEMS Accelerometer with an Au Single Proof-Mass

〇(B)Takashi Ichikawa¹, Hirofumi Niijima¹, Tatsuya Koga¹, Daisuke Yamane¹, Toshifumi Konishi², Teruaki Safu², Shinichi Iida², Hiroyuki Ito¹, Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT)

Keywords:MEMS, Multi-layer metal technology, high resolution

We have developed the high sensitive tri-axes MEMS accelerometer for human body diagnostics as applications. In order to realize the high performance tri-axes MEMS accelerometer, we investigated the thickness of Au to design a proof mass and a parallel plate electrode structure for the wide detection range. The paper describes the experimental evaluation results from the proposed devices.