[18p-PB3-1~95] 17 Nanocarbon Technology (Poster)

[18p-PB3-74] Enhanced nucleation of graphene on the backside of the tantalum/copper substrate by chemical vapor deposition

〇(PC)Seiya Suzuki¹, Hotaka Sumi¹, Masanori Hara¹, Masamichi Yoshimura¹ (1.Toyota Tech. Inst.)

Keywords:graphene, chemical vapor deposition, tantalum

Chemical vapor deposited graphene is generally polycrystalline. To avoid degrading carrier mobility at domain boundaries of graphene, it is necessary to obtain large-sized single crystal graphene by suppressing nucleation. In this research, we found that nucleation density was locally increased on the backside of the tantalum/Cu substrate. We believe the unusual effect can be utilized for large-sized graphene growth.