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[18p-PB3-74] Enhanced nucleation of graphene on the backside of the tantalum/copper substrate by chemical vapor deposition
Keywords:graphene, chemical vapor deposition, tantalum
Chemical vapor deposited graphene is generally polycrystalline. To avoid degrading carrier mobility at domain boundaries of graphene, it is necessary to obtain large-sized single crystal graphene by suppressing nucleation. In this research, we found that nucleation density was locally increased on the backside of the tantalum/Cu substrate. We believe the unusual effect can be utilized for large-sized graphene growth.