The 79th JSAP Autumn Meeting, 2018

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[19a-141-1~6] 8.1 Plasma production and diagnostics

Wed. Sep 19, 2018 9:00 AM - 10:30 AM 141 (141+142)

Shusuke Nishiyama(Hokkaido Univ.)

9:15 AM - 9:30 AM

[19a-141-2] Evaluation on Capacitive Coupling Plasma with Pulsed DC Discharge

〇Takahiro Shindo1, Yasushi Morita1, Ayuta Suzuki1, Tatsuo Matsudo1 (1.Tokyo Electron Technology Solutions Ltd.)

Keywords:Pulsed DC, Electron Density, Ion Energy