10:30 AM - 10:45 AM
[19a-143-4] Development of ferromagnetic resonance probes for scanning probe microscope
Keywords:Magnetic Force Microscopy
In this paper, we attempt to develop a magnetic field measurement cantilever using ferromagnetic resonance to exceed the spatial resolution limited by the superparamagnetic limit.
A permalloy thin film was formed on the center electrode of CPW prepared by EB lithography on SiO2 / Si substrate, and the measurement of ferromagnetic peak shift was carried out by measuring S paracetry by a vector network analyzer (Vector Network Analyzer: VNA).
A permalloy thin film was formed on the center electrode of CPW prepared by EB lithography on SiO2 / Si substrate, and the measurement of ferromagnetic peak shift was carried out by measuring S paracetry by a vector network analyzer (Vector Network Analyzer: VNA).