[19a-231C-1~10] 12.1 Fabrications and Structure Controls

[19a-231C-6] Investigation of the Influence of Film Temperature During Photoconversion of Pentacene Precursor Thin Films

〇(M2)Yuta Tameike¹, Wolfgang Voegeli¹, Etsuo Arakawa¹, Toshio Takahashi¹, Tetsuroh Shirasawa², Hiroko Yamada³, Mitsuharu Suzuki³, Tadashi Matsushita⁴ (1.Tokyo Gakugei Univ., 2.AIST, 3.NAIST, 4.KEK-PF)

Keywords:X-ray reflectivity, Pentacene, Photoconversion

Using thin films of a photo convertible precursor of pentacene has been proposed as a production method for pentacene thin films. In this research, the structural evolution during the photoconversion of precursor thin films was investigated by time-resolved X-ray reflectivity. Simultaneously, the crystallinity and crystal phase of the thin films was measured. The influence of film temperature during conversion was evaruated.