DUV Laser Platform for Semiconductor Inspection

Presentation information

Oral presentation

3 Optics and Photonics » 3.5 Laser system and materials

Wed. Sep 19, 2018 9:00 AM - 10:30 AM 431B (431-2)

10:15 AM - 10:30 AM

〇Kentaro Miyata¹, Akihiro Tanabashi¹, Mizuki Mohara², Kei Shimura², Shinichi Nakayama³, Satoshi Wada¹ (1.RIKEN, 2.Hitachi High-Tech., 3.Megaopto)

Keywords:semiconductor inspection, laser, frequency conversion