10:15 AM - 10:30 AM
[19a-436-4] Formation of Pd silicide on Si nanowire
Keywords:silicide
Oral presentation
13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices
Wed. Sep 19, 2018 9:30 AM - 11:45 AM 436 (436)
Takashi Suemasu(Univ. of Tsukuba), Hirokazu Tatsuoka(Shizuoka Univ.)
10:15 AM - 10:30 AM
Keywords:silicide