The 79th JSAP Autumn Meeting, 2018

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Oral presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[19a-438-1~12] 3.8 Optical measurement, instrumentation, and sensor

Wed. Sep 19, 2018 9:00 AM - 12:15 PM 438 (3F_Lounge)

Yosuke Tanaka(TUAT), Toshihiro Somekawa(Inst. for Laser Tech.)

11:15 AM - 11:30 AM

▼ [19a-438-9] Structured-Light Sensor Based on Non-mechanical VCSEL Beam Scanner

〇(M1)Ruixiao Li1, Zeuku Ho1, Xiaodong Gu1, Fumio Koyama1 (1.Photonics Integration System Research Center, FIRST, Tokyo Institute of Technology)

Keywords:Structured light, VCSEL scanner, Sensor

We demonstrated a scanning structured-light sensor based on non-mechanical VCSEL beam scanner, which achieves the accuracy of less than 0.2mm when measuring a sample with step depth of 2.85mm.