[19a-438-1~12] 3.8 光計測技術・機器

▼ [19a-438-9] Structured-Light Sensor Based on Non-mechanical VCSEL Beam Scanner

〇(M1)Ruixiao Li¹、Zeuku Ho¹、Xiaodong Gu¹、Fumio Koyama¹ (1.Photonics Integration System Research Center, FIRST, Tokyo Institute of Technology)

キーワード：Structured light, VCSEL scanner, Sensor

We demonstrated a scanning structured-light sensor based on non-mechanical VCSEL beam scanner, which achieves the accuracy of less than 0.2mm when measuring a sample with step depth of 2.85mm.