The 79th JSAP Autumn Meeting, 2018

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Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[19p-133-1~19] 6.1 Ferroelectric thin films

Wed. Sep 19, 2018 1:45 PM - 7:00 PM 133 (133+134)

Tomoaki Yamada(Nagoya Univ.), Takeshi Yoshimura(Osaka Pref. Univ.), Takashi Eshita(Wakayama Univ.), Hiroshi Naganuma(Tohoku Univ.)

4:30 PM - 4:45 PM

[19p-133-11] Structural Damages of Lead-free Ferroelectric Thick-Films by Proton Beam Irradiation

〇Masaki Yamaguchi1,2, Yoichiro Masuda3, Jun Hirade1 (1.Shibaura Inst. of Tech., 2.RCGI, Shibaura Inst. of Tech., 3.Hachinohe Inst. of Tech.)

Keywords:Ferroelectric film, Proton Beam Irradiation

Flexible pattern fabrication is expected of focused proton beam irradiation. And, improvement of the film properties can be expected by proton beam irradiation. In this study, we try the theoretical analysis for structural damage of ferroelectric thick films by proton beam irradiation.