[19p-133-1~19] 6.1 Ferroelectric thin films

△ [19p-133-6] In-situ observation of crystallographic deformation of (K,Na)NbO₃ lead-free thin films under voltage application

〇Geng Tan¹, Shintaro Nishioka¹, Tomoyuki Koganezawa², Toshihito Umegaki¹, Isaku Kanno¹ (1.Kobe Univ., 2.JASRI)

Keywords:In-situ XRD measurement, Lead-free piezoelectric thin films

(K,Na)NbO₃ (KNN) lead-free thin films have been receiving much attention owing to their relatively high piezoelectric properties comparable to PZT thin films. KNN thin films are expected to be suitable alternatives to PZT thin films. In order to improve the piezoelectric properties of KNN thin films, it is essential to understand the crystallographic deformation under application of voltages. In this study, we investigated the synchrotron X-ray diffraction (XRD) of KNN thin films in the both in-plane and out of plane directions under applied DC voltages. We also compared the result with that of PZT thin films.