[19p-221A-1~18] 9.2 Nanowires and Nanoparticles

[19p-221A-2] Site-controlled vertical growth of InP nanowires by self-catalyzed VLS mode

〇Guoqiang Zhang^1,2, Kouta Tateno^1,2, Takehiko Tawara^1,2, Hideki Gotoh¹ (1.NTT BRL, 2.NTT NPC)

Keywords:nanowire, crystal growth, semiconductor

Here we report systematic study on vertical growth of site-controlled InP nanowires by self-catalyzed vapor-liquid-solid (VLS) mode. we have clarified the flow rate and deposition time of indium particles are key parameters to realize vertical growth of site-controlled InP nanowires. We have further developed two-step growth process consisting of nucleation and high-growth-rate steps to improve growth efficiency.