[19p-221A-1~18] 9.2 ナノワイヤ・ナノ粒子

[19p-221A-2] 自己触媒法で作製した垂直InPナノワイヤの配列

〇章 国強^1,2、舘野 功太^1,2、俵 毅彦^1,2、後藤 秀樹¹ (1.NTT物性研、2.NTTナノフォトセンタ)

キーワード：ナノワイヤ、結晶成長、半導体

Here we report systematic study on vertical growth of site-controlled InP nanowires by self-catalyzed VLS mode. we have clarified the flow rate and deposition time of indium particles are key parameters to realize vertical growth of site-controlled InP nanowires. We have further developed two-step growth process consisting of nucleation and high-growth-rate steps to improve growth efficiency.