[19p-224A-1~8] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19p-224A-5] Correspondence between PL spectra and conductive properties of ZnO films - III

〇Housei Akazawa¹ (1.NTT DIC)

Keywords:ZnO, donor, photoluminescence

We have been studying the relation between PL spectra and transparent conductive properties of ZnO films to verify the donors. Here, we reporrt hydrogen donors resulting from annealing in H2 ambient. We also report PL properties from oxyggen-deficient ZnO films on sapphire substrates.