The 79th JSAP Autumn Meeting, 2018

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7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[19p-234A-1~10] 7.3 Micro/Nano patterning and fabrication

Wed. Sep 19, 2018 1:30 PM - 4:15 PM 234A (234-1)

Jiro Yamamoto(HITACHI), Jun Taniguchi(Tokyo Univ. of Sci.), Hiroaki Kawata(Osaka Pref. Univ.)

4:00 PM - 4:15 PM

[19p-234A-10] Fabrication of antireflection structures on the micro lens array

〇(M1)Masato Nakamura1, Jun Taniguchi1 (1.TUS)

Keywords:antireflection structure, ultra violet nano imprint lithography, micro-lens array

In recently, the optical lens performance is restricted by reflection occurring on the lens surface. Thereby, there is an increasing demand for an antireflection structure (ARS). In this study, we can fabricate ARS on complex shape and minute micro-lens array by using the reverse replica mold. Also, the reflection of the micro-lens array was 3.6 %, but it was suppressed to 0.5 % by the ARS.