[19p-234A-1~10] 7.3 Micro/Nano patterning and fabrication

[19p-234A-6] Fabrication of through hole electrodes for flexible devices

〇(M1)Kazuki Honjo¹, Taniguchi Jun¹ (1.TUS)

Keywords:through hole electrode

In recent years, There is a growing demand for flexible devices, but there is no established method for manufacturing devices that interconnect with both sides of flexible substrate and perform two operations. For this reason, we devised to create a through hole electrodes by forming a through hole by ultraviolet nanoimprint lithography and filling with silver ink as a new method of integrating a flexible devices.