The 79th JSAP Autumn Meeting, 2018

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Oral presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[19p-438-1~19] 3.8 Optical measurement, instrumentation, and sensor

Wed. Sep 19, 2018 1:45 PM - 7:00 PM 438 (3F_Lounge)

Tatsutoshi Shioda(Saitama Univ.), Takeshi Yasui(Tokushima Univ.), Takehiko Tanabe(AIST)

5:30 PM - 5:45 PM

[19p-438-14] Precise determination of the refractive index by micro-ellipsometry

〇Toshihide Tsuru1, Hiroshi Yagi1 (1.Yamagata Univ.)

Keywords:refractive index, ellipsometry

For precise determination of the refractive index of the microscopic sample, we have developed the micro-ellipsometer consisting of a null ellipsometer and a Schwarzschild objective. The numerical aperture of the objective mirror required from measurement accuracy will be discussed. We will also report the optical setup and measurement principle in detail.