Laser Displacement Sensor for MEMS to Measure Piconewton Forces (2)

Masanobu Shigaki; Yoshito Tanaka; Takaaki Sato; Tsutomu Shimura

Presentation information

Oral presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[19p-438-1~19] 3.8 Optical measurement, instrumentation, and sensor

Wed. Sep 19, 2018 1:45 PM - 7:00 PM 438 (3F_Lounge)

Tatsutoshi Shioda(Saitama Univ.), Takeshi Yasui(Tokushima Univ.), Takehiko Tanabe(AIST)

6:15 PM - 6:30 PM

△ [19p-438-17] Laser Displacement Sensor for MEMS to Measure Piconewton Forces (2)

〇(D)Masanobu Shigaki¹, Yoshito Tanaka^1,2, Takaaki Sato¹, Tsutomu Shimura¹ (1.IIS, the Univ. of Tokyo, 2.JST PRESTO)

Keywords:laser displacement sensor, piconewton, MEMS

Measuring piconewton forces is required for not only physics but also biometry. We develop a laser displacement sensor, to which a principle of Michelson interferometer is applied, and a MEMS device, to measure a displacement generated by a force from sub-piconewton order to piconewton order.