The 79th JSAP Autumn Meeting, 2018

Presentation information

Print

Poster presentation

16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[19p-PA5-1~14] 16.3 Bulk, thin-film and other silicon-based solar cells

Wed. Sep 19, 2018 1:30 PM - 3:30 PM PA (Event Hall)

1:30 PM - 3:30 PM

[19p-PA5-5] Light induced damage during RPD-ITO process

〇Yuki Isogai1, Takefumi Kamioka1,2, Hyunju Lee1, Nobuaki Kojima1, Yoshio Ohshita1 (1.Toyota Technological Inst., 2.Meiji Univ.)

Keywords:Reactive Plasma Deposition, Light induced damage, interface defect density