[19p-PA6-1~6] 1.5 Instrumentation, measurement and Metrology

[19p-PA6-5] Deveropment of the lectron filter for SEM in-situ creep testing

〇(M1)Daichi Ishige¹, Ichitaka Ikeda¹, Hirosi Suga¹ (1.CIT)

Keywords:In situ observation

In this research, in order to establish an in-situ observation technique of creep deformation process using SEM, a creep deformation test method using wire specimen and a method of creep deformation using a two-piece electrode Verify the effect and perform creep deformation scanning electron microscopy in situ observation