[19p-PA7-1~29] 3.12 Nanoscale optical science and near-field optics

[19p-PA7-8] High Sensitive Measurement Technology based on Scanning Microwave Microscopy

〇Iku Hirano¹, Masahiro Horibe¹ (1.AIST)

Keywords:Scanning Microwave Microscopy, Vector Network Analyzer, T-junction type interferometric technique

We have demonstrated a near-field scanning microwave microscopy (SMM) based on an atomic force microscopy (AFM) with mechanical impedance tuning techniques and interferometric circuits for high sensitive measurement. The T-junction type interferometric technique is possible to produce high sensitivity and clearer image observation of the N type dopant sample.