[19p-PA9-1~7] 22 Joint Session M (Poster)

[19p-PA9-4] Formation of laterally graded Si_xGe_1-x stripes for thermoelectric generator

〇(B)Masaya Nakata¹, Kouta Takahashi^1,2, Taiki Nishijima³, Satoshi Shimizu³, Isao Tsunoda³, Osamu Nakatsuka^1,4, Shigeaki Zaima⁵, Takanobu Watanabe⁶, Masashi Kurosawa^1,7,8 (1.Grad. Sch. of Eng., Nagoya Univ., 2.JSPS, 3.NIT, Kumamoto College, 4.IMaSS, Nagoya Univ., 5.IIFS, Nagoya Univ., 6.Waseda Univ., 7.IAR, Nagoya Univ., 8.JST-PRESTO)

Keywords:SiGe