[19p-PB1-1~37] 6.3 Oxide electronics

[19p-PB1-16] Investigation of Hydrogen-Free SiO₂-PECVD for Functional Metal-Oxide Materials

〇Hideaki Zama¹, Tadamasa Kobayashi¹ (1.ISM, ULVAC,Inc.)

Keywords:PECVD, SiO2, hydrogen-free

We evaluate the SiO₂-PECVD process without reducibility by using a raw material not containing hydrogen for functional metal-oxide materials.