[19p-PB1-1~37] 6.3 Oxide electronics

[19p-PB1-31] Electrical and optical properties of IWO thin films fabricated by the pressure gradient type plasma gun

〇Yoshiharu Yamada¹, Noriaki Hashimoto², Eiji Furuya², Yusuke Kondo¹, Yoshiharu Kakehi¹, Kazuo Satoh¹, Takashi Mori¹, Takeshi Tanaka¹ (1.ORIST, 2.Chugairo Co.,Ltd.)

Keywords:transparent conductive film, near-infrared light