The 79th JSAP Autumn Meeting, 2018

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[19p-PB1-1~37] 6.3 Oxide electronics

Wed. Sep 19, 2018 1:30 PM - 3:30 PM PB (Shirotori Hall)

1:30 PM - 3:30 PM

[19p-PB1-33] Examination of AZO Films on Zn Films Deposited by Sputtering Method

Hidehiko Shimizu1, Haruo Iwano1, Takahiro Kawakami1, Yasuo Fukushima1, Koutaro Nagata1 (1.Niigata Univ.)

Keywords:AZO, TCO films, sputtering method

In this research, the Zn films were deposited on the glass substrates at the room temperature by sputtering method. And the AZO films deposited on those at 200 ℃ using a sputtering method were considered.