[19p-PB1-1~37] 6.3 Oxide electronics

[19p-PB1-33] Examination of AZO Films on Zn Films Deposited by Sputtering Method

〇Hidehiko Shimizu¹, Haruo Iwano¹, Takahiro Kawakami¹, Yasuo Fukushima¹, Koutaro Nagata¹ (1.Niigata Univ.)

Keywords:AZO, TCO films, sputtering method

In this research, the Zn films were deposited on the glass substrates at the room temperature by sputtering method. And the AZO films deposited on those at 200 ℃ using a sputtering method were considered.