[19p-PB2-1~8] 6.5 Surface Physics, Vacuum

[19p-PB2-5] Influences of Ti Seed Layers on the Dewetting Structure of Au-Ag Alloy Films on MgO(001) Substrates

〇Masao Kamiko¹, Woo-Seong Kim², Tae-Hwan Kim², Tae-Woong Um², Yoshitaka Mitsuda¹, Jae-Geun Ha² (1.IIS, Univ. of Tokyo, 2.Kwangwoon Univ.)

Keywords:dewetting, self-organization, metallic nanostructure

Influences of thin Ti seed layer (1 nm) on the dewetting structure of Au-Ag metallic thin film (5 nm) grown onto MgO(001) single crystal substrates by magnetron sputtering has been studied and compared. The samples were deposited at room temperature and post-annealed at 350-450 degrees Celsius for 5 hours under the chamber vacuum condition. Results obtained in this study indicated that the introducing of the Ti seed layer between the substrate and Au-Ag layer promoted crystallinity of the alloy film, and provided a certain change in the dewetting structure of the Au-Ag alloy film.