[19p-PB5-1~14] 13.9 Compound solar cells

△ [19p-PB5-11] Deposition of CuGaS₂ thin films by co-sputtering

〇(M2)Hiroya Matsubayashi¹, Nazmul Ahsan², Kim Myeongok³, Kalainathan Sivaperuman⁴, Yoshitaka Okada^1,2 (1.Elec. Eng. UTokyo, 2.RCAST UTokyo, 3.Col. Arts and Sci. UTokyo, 4.VIT University)

Keywords:chalcopyrite semiconductor, solar cell, magnetron sputtering

We focus on the next-generation solar cell based on wide-gap chalcopyrite semiconductors. A series of CuGaS₂ thin-films were deposited on glass substrates by magnetron sputtering, and their crystallinities are characterized. However, the CuGaS₂ thin-films sputtered with CuGaS₂ target were not stoichiometric. The ratio of Cu to Ga was controlled by co-sputtering with CuGaS₂ and GaS targets, and their crystallinities are characterized.