11:45 AM - 12:00 PM
[20a-141-11] The Effect of NO Annealing on Electrical Stress Tolerance of SiO2 / SiC
Keywords:SiC, NO Annealing
Presentation information
Oral presentation
15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)
[20a-141-1~13] 15.6 Group IV Compound Semiconductors (SiC)
Thu. Sep 20, 2018 9:00 AM - 12:30 PM 141 (141+142)
Katsuhiro Kutsuki(Toyota Central R&D Labs.)