The 79th JSAP Autumn Meeting, 2018

Presentation information

Oral presentation

21 Joint Session K » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20a-234A-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Thu. Sep 20, 2018 9:00 AM - 12:00 PM 234A (234-1)

Takashi Yasuda(Ishinomaki Senshu Univ.)

10:15 AM - 10:30 AM

[20a-234A-6] Improvement of crystallinity of two types of non-polar ZnO thin films on sapphire substrate formed by mist-CVD

Yudai Tanaka1, Hironobu Tanoue1, Yuki Nagao1, Takumi Furukawa1, Shoji Nagaoka3,4, Zenji Yatabe1,2, Yusui Nakamura1,4 (1.GSST Kumamoto Univ., 2.POIE Kumamoto Univ., 3.Kumamoto IRI, 4.Phoenics)

Keywords:ZnO, mist-CVD, crystallinity