[20a-437-1~11] 8.3 Plasma nanotechnology

[20a-437-2] Low Damage Radical Nitridation of Gold Nanoparticle Catalyst Coated Silicon

〇Takeshi Kitajima¹, Kohei Honda¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)

Keywords:plasma, nanaoparticle, catalyst