[20a-PA1-1~11] 7 Beam Technology and Nanofabrication (Poster)

[20a-PA1-11] Effect of Ar-cluster irradiation on DNA/Si-MOSFET

〇Hibiki Nakano¹, Naoto Matsuo¹, Akira Heya¹, Kazushige Yamana¹, Tadao Takada¹, Kousuke Moritani¹, Norio Inui¹, Yu Sato¹, Tadashi Sato², Shin Yokoyama² (1.univ. of Hyogo, 2.univ. of Hiroshima)

Keywords:semiconductor, DNA, MOSFET