The 79th JSAP Autumn Meeting, 2018

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Poster presentation

7 Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication (7.1～7.5) (Poster)

[20a-PA1-1~11] 7 Beam Technology and Nanofabrication (Poster)

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)

9:30 AM - 11:30 AM

[20a-PA1-5] Negative bias dependence of surface potential distribution of insulator sample irradiated with electron beam

〇Shota Nishimura1, Hideya Mizuno1, Kento Kubo1, Masatoshi Kotera1 (1.Osaka Institute Univ.)

Keywords:SEM, Electoron Beam