The 79th JSAP Autumn Meeting, 2018

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Poster presentation

13 Semiconductors » 13.3 Insulator technology

[20a-PA5-1~14] 13.3 Insulator technology

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)

9:30 AM - 11:30 AM

[20a-PA5-12] Surface state of Ge substrate by S-Passivation process

〇Tatsuya Kuroda1, Syunpei Ogawa1, Yasuyuki Katou1, Kazuhiro Niwa1, Hiroki Ishizaki1 (1.Saitama Institute of Technology)

Keywords:Semiconducter, Passivation