[20a-PB5-1~10] 3.14 Optical control devices and optical fibers

[20a-PB5-2] a-Si/LiNbO₃ Hybrid Waveguide and MZ Modulator

〇Kenta Yoshidomi¹, Qiu Feng², Shiyoshi Yokoyama^1,2 (1.Kyushu Univ., 2.Kyushu Univ. IMCE)

Keywords:modulator, LiNbO3, Si waveguide

We made a hybrid a-Si/LNOI waveguide and investigated optical properties as the intensity modulator. According to the optical mode simulation, the optical field focused into the layer of LiNbO₃. Therefore, the measured VπL of the modulator was enhanced to the 2.1 V・cm. We can expect that the EO properties may be more improved after suitable design and application.