The 79th JSAP Autumn Meeting, 2018

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20a-PB9-1~14] 6.2 Carbon-based thin films

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PB (Shirotori Hall)

9:30 AM - 11:30 AM

[20a-PB9-6] Fabrication and structural analysis of high-nitrogen containing a-CNx:H thin films using radio-frequency plasma CVD of the benzene-N2-Ar gas mixtur

〇Yoshinori Karo1, Yoshiki Iizawa1, Hidetoshi Saitoh1, Haruhiko Ito1 (1.Nagaoka Univ.of Tech)

Keywords:plasma CVD, thin film, carbon nitride