3:45 PM - 4:00 PM
[20p-133-8] Passivation Quality of a-Si1-xOx:H Thin Film
Keywords:solar cells, heterojunction, amorphous Silicon
We study the-application of Si1-xOx:H thin film to the surface passivation layer of the ultra-thin heterojunction solar cells with Rib structure. In order to evaluate its passivation quality at a few nm thickness actually applied in the devices, the carrier lifetime measurement by the QSSPC method was carried out by using the sandwich structure samples where the n-type a-Si:H/ a-Si1-xOx:H layers were coated on the both sides of the n-type c-Si substrate.