The 79th JSAP Autumn Meeting, 2018

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Symposium (Oral)

Symposium » Renaissance and Novel Development of Poly Si TFT Technology

[20p-144-1~12] Renaissance and Novel Development of Poly Si TFT Technology

Thu. Sep 20, 2018 1:30 PM - 6:35 PM 144 (4Ｆ_Lobby)

Takashi Noguchi(Univ. of the Ryukyus), Tatsuya Okada(Univ. of the Ryukyus)

2:15 PM - 2:45 PM

[20p-144-3] Grain-Boundary Free (100)-Oriented Si Thin Films Grown by CW Laser Lateral Crystallization

〇Nobuo Sasaki1,2 (1.Sasaki Consulting, 2.NAIST)

Keywords:LTPS, laser crystallization, crystal growth

This paper descibes the evolution of CW laser lateral crystallization from the previous CLC technology to the present grain-boundary free (100) CLC.