3:30 PM - 3:45 PM
[20p-144-6] Metal Source/Drain Structure TFTs using poly-Si Films Crystallized by Blue Multi-Laser Diode Annealing
Keywords:Blue Multi-Laser Diode Annealing
Presentation information
Symposium (Oral)
Symposium » Renaissance and Novel Development of Poly Si TFT Technology
[20p-144-1~12] Renaissance and Novel Development of Poly Si TFT Technology
Thu. Sep 20, 2018 1:30 PM - 6:35 PM 144 (4Ｆ_Lobby)
Takashi Noguchi(Univ. of the Ryukyus), Tatsuya Okada(Univ. of the Ryukyus)