The 79th JSAP Autumn Meeting, 2018

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20p-222-1~23] 6.2 Carbon-based thin films

Thu. Sep 20, 2018 1:15 PM - 7:30 PM 222 (222)

Masami Aono(National Defence Academy), Toru Harigai(Toyohashi Univ. of Tech.), Tokuyuki Teraji(NIMS), Yukako Kato(AIST)

1:15 PM - 1:30 PM

[20p-222-1] High purity homoepitaxial diamond (111) film growth

〇Tokuyuki Teraji1, Kenji Watanabe1 (1.NIMS)

Keywords:diamond, chemical vapor deposition, purity

We attempted to grow high-purity diamond (111) film by applying oxygen adding growth condition. Through 74 h growth under the optimal condition, 140 µm-thick homoepitaxial diamond (111) film was obtained. Cathodoluminescence measurements revealed that nitrogen related luminescence was negligibly small.