The 79th JSAP Autumn Meeting, 2018

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Symposium (Oral)

Symposium » Current status and future prospect of atomic layer processes

[20p-223-1~11] Current status and future prospect of atomic layer processes

Thu. Sep 20, 2018 1:45 PM - 6:45 PM 223 (223)

Makoto Sekine(Nagoya Univ.), Takeshi Momose(Univ. of Tokyo), Daisuke Hojo(AIST), Kazuhiro Karahashi(Osaka univ.)

6:30 PM - 6:45 PM

[20p-223-11] Complex-formation reaction analysis for atomic-layer etching of metal surfaces

〇Tomoko Ito1, Kazuhiro Karahashi1, Satoshi Hamaguchi1 (1.Osaka Univ.)

Keywords:Atomic layer etching