[20p-233-1~10] Advanced ion microscopy for future nanoelectronics materials and devices

▲ [20p-233-3] Graphene nanoelectromechanical (GNEM) devices functionalized by using helium ion beam for nanoscale thermal engineering

〇Hiroshi Mizuta^1,4, Mayeesha Hauqe¹, Seiya Kubo¹, Mikio Koyano¹, Yoshifumi Oshima¹, Manoharan Muruganathan¹, Yusuke Arashida², Ikufumi Katayama², Jun Takeda², Shinichi Ogawa³, Marek Schmidt¹ (1.JAIST, 2.YNU, 3.AIST, 4.Hitachi Cambridge Lab)

Keywords:graphene, phononic crystal, nanofabrication

We report on our recent progress of single-nanometer-scale patterning of suspended graphene structures by using focused helium ion beam of sub-1-nm in diameter and their applications to heat phonon engineering. We demonstrate the technique to fabricate graphene phononic crystals (GPnCs) with the two-dimensional array of 3-4 nm pores with the pitch down to 10 nm on multi-scale suspended graphene channels ranging from 100 nm to a few microns in length and width. We also briefly introduce simulation and characterization techniques for electronic and phonic states in GPnCs and discuss the possibility of GPnC-based thermal rectification devices.