5:15 PM - 5:45 PM
▲ [20p-233-9] Xenon Plasma FIB Technology and Applications
Keywords:FIB, Xenon ion plasma
Presentation information
Symposium (Oral)
Symposium » Advanced ion microscopy for future nanoelectronics materials and devices
[20p-233-1~10] Advanced ion microscopy for future nanoelectronics materials and devices
Thu. Sep 20, 2018 1:30 PM - 6:00 PM 233 (233)
Reo Kometani(Univ. of Tokyo), Shinichi Ogawa(AIST)