Direct bonding of CVD monolayer graphene to Si/SiO<sub>2</sub> substrate for mass production of graphene devices

Presentation information

Oral presentation

17 Nanocarbon Technology » 17.2 Graphene

Thu. Sep 20, 2018 1:45 PM - 6:30 PM 311 (Cascade)

Ken Uchida(Keio Univ.), Hiroshi Tabata(Osaka Univ.)

4:45 PM - 5:00 PM

〇Masaaki Shimatani^1,2, Satoshi Okuda¹, Shoichiro Fukushima¹, Shinpei Ogawa¹, Takashi Ikuta², Kenzo Maehashi² (1.Mitsubishi Electric Corp., 2.TUAT)

Keywords:graphene, CVD, transfer