The 79th JSAP Autumn Meeting, 2018

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3 Optics and Photonics » 3.2 Equipment optics and materials

[20p-436-1~7] 3.2 Equipment optics and materials

Thu. Sep 20, 2018 1:45 PM - 3:45 PM 436 (436)

Hidekazu Ishitobi(Osaka Univ.), Ryuichi Katayama(Fukuoka Inst. of Tech.)

2:15 PM - 2:30 PM

[20p-436-3] Bending Technique of Planar Device for Manufacturing Curved Device
Having Wavelength-Subwavelength Structure２

〇Kenta Yaegashi1, Yoshisada Ebata1, Shigeru Matsui1, Takanori Aono2 (1.Hitachi High-Tech, 2.Hitachi R&D)

Keywords:diffraction gratings

我々は MEMS/NEMS (Micro / Nano Electro Mechanical Systems) 素子や光学素子向けに, 微細構造付き平面素子を二次元に曲面化する研究に取り組んでいる. 講演では新規開発した曲面化技術及び試作した凹面回折格子の特性について報告する.