[20p-PA4-1~23] 12.7 Biomedical Engineering and Biochips

▲ [20p-PA4-7] Development of a lead-zirconium-titanate (PZT) actuator array using a CMOS-compatible solution process

Reijiro Shimura^1,2, 〇Tue Trong Phan¹, Tatsuya Shimoda¹, Yuzuru Takamura¹ (1.School of Materials Science, Japan Advanced Institute of Science and Technology, 2.Tokyo Institute of Technology)

Keywords:BioMEMS, piezoactuator, low-temperature solution processing

For fabrication of high-density piezoelectric nanodevices and their integration with silicon-based CMOS circuits, low-temperature (≤ 450 oC) processing of piezoelectric films is a must. Previously, we have reported a feasible approach for fabricating high-quality solgel-derived PZT films and actuators at a temperature below 450 oC using a novel UV/ozone-assisted annealing method. However, the fabricated device had a low density, and factors that influence on actuator’s performance such as diaphragm structure and thickness of PZT film have not been investigated. In this work, we report on fabrication and optimization of a high-density actuator array, which is designed for possible integration with an active-matrix thin-film transistor for electrical control.We found that the displacement increased as the cavity diameter increased. The displacement was also observed to get decreased when the PZT film thickness increased. These results indicated that proper ranges for the cavity diameter and PZT thickness are 50-70 µm and 450-600 nm, respectively. Moreover, it was confirmed that the fabricated actuator is able to generate ideal driving force for micropump/valve application.